
Russian firm completes country's first 130nm-capable chipmaking tool, trails modern equipment by 25 years
Russia-based Zelenograd Nanotechnology Center (ZNTC) has completed the third R&D stage of the company's first lithography tool capable of processing 200-mm wafers using a 130nm process technology, reports CNews. The tool is currently being tested internally and is years away from being used at a real fab to produce chips in mass quantities. Blogger Dmitrii Kuznetsov suggests that the device is the "first Russian 130nm-capable lithograph" that consists of components made in Russia. This may not be the case, though.
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"The creation of a prototype of a domestically developed photolithography system designed for a …
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