Gigaphoton debuts neon recycling system with claimed 50% recovery rate

Japanese semiconductor lithography tool maker Gigaphoton has developed a novel neon gas recycling system named hTGM for its argon fluoride (ArF) excimer lasers. The method has demonstrated a 50% recycling rate, with hopes that it can be improved dramatically with adjusted configurations, Business Wire reports. This could help fill a gap in the chip supply chain caused by the Russian invasion of Ukraine. Before 2022, Ukraine shipped up to 50% of the neon gas used in the semiconductor industry, but its major producers had to stop exports, raising concerns over chip supply. 70% of global neon production is used in semiconductor manufacturing, particularly in advanced DUV processes.

In the aftermath, China, Taiwan, and South Korea all increased their own domestic Neon production efforts, but various chip manufacturers also integrated recycling systems at various points during the fabrication process. …